Ultra High Precision Motion Controller for Nano-Positioning Applications - E-755 - Physik Instrumente

PI (Physik Instrumente) introduced the new E-755 ultra-high-precision motion controller. The controller is designed to drive NEXLINE linear motor actuators and enables the combination of long travel ranges and picometer resolution.

Physik Instrumente is a manufacturer of nanopositioning and piezo-based precision motion-control equipment for bio-nanotechnology, photonics and semiconductor applications.

E-755 NEXLINE Controller with N-214 Nano-Positioner

The new E-755 NEXLINE ultra high motion controller combines sophisticated control algorithms, high-end 32-bit digital filters and output drivers with extremely low-noise, 24-bit D/A converters. NEXLINE Controllers can be run in closed-loop and open-loop mode. In closed-loop operation, outstanding linearity, within 0.001% over the full travel range, is achieved by polynomial linearization. The motion controller provides an input for the nanometer precision incremental linear encoders that are integrated in standard NEXLINE actuators. Due to the low-noise, 24 bit D/A converters, the E-755 controllers can provide picometer level resolution in the highly-dynamic short-range / dithering mode that the actuators support.

Features & Advantages of E-755 Ultra High Precision Motion Controller includes:

• Special Control Algorithms for NEXLINE PiezoWalk Nano Drives
• Fully Programmable Low-Pass and Notch Filters
• 32-Bit Digital Filters
• 24-Bit DAC Resolution
• Integrated Piezo Amplifiers
• Non-Volatile User Settings and Last-Position Data

E-755 digital nanopositioning controllers are designed to drive the novel, patented, NEXLINE® nanopositioning linear drives. Combining advanced control technology and sensor signal processing with special drive algorithms, the E-755 can provide precision motion control over hundreds of millimeters with picometer-range resolution.
Coordinated action of shearing and clamping piezo elements is what allows NEXLINE® to break through the barriers of conventional nanopositioning actuators.

The E-755 offers two different control modes: a high-resolution, high dynamics direct piezo mode, with basically unlimited resolution, and a long-range mode with theoretically unlimited travel range.

NEXLINE Linear Motor Actuators
NEXLINE is a patented high-force, ultra-high-precision linear motor actuator developed to bridge the gap between micro- and nanopositioning technology. The highly reliable, all-ceramic NEXLINE drives have won a technology award from the semiconductor community and are ideally suited for static and dynamic high-precision positioning of high loads.

E-755 motion controllers are based on powerful 32-bit DSPs and come in open- and closed-loop versions. Both versions feature four high-resolution (24-bit) linear amplifiers with an output range of ±250 V required to control a single-axis NEXLINE® drive. For the closed-loop models, high-resolution incremental position sensors are supported by special excitation and read-out electronics. The sensors supported may provide better than nanometer resolution. A power-down routine in the E-755 firmware saves the current position, allowing a closed-loop system to be ready for use without referencing next time it is powered up.

NEXLINE® nanopositioning actuators can often be found in inaccessible locations deep inside complex equipment, where nanometer-precise alignment and vibration cancellation are required. This makes the long lifetime of NEXLINE® drives especially advantageous. The E-755 firmware incorporates a special procedure to bring the NEXLINE® actuator to a full-holding-force zero-drive-voltage condition, no matter where it is along its travel range. This eliminates long-term offset voltages, which can limit the lifetime of conventional piezo drives.

E-755controlled nanopositioning systems provide outstanding linearity, achieved by digital polynomial linearization. The linearization can improve linearity to 0.001% over the full travel range.

Typical Applications of E-755 Ultra High Precision Motion Controller:

• Nanotechnology
• Nano-Imprint
• Semiconductor manufacturing
• Nanomanipulation
• Truss structures
• Active vibration control
• Alignment in high magnetic fields, as in particle physics, atomic fusion and superconductivity research
• Bio-Technology
• Astronomical telescopes

The E-755 ultra high motion controller come with an software package including LabVIEW drivers for automation of nano-positioning tasks.

Further reading: PI E-755 Ultra High Precision Motion Controller