Tesla On-Wafer Power Device Measurement System - Cascade

Cascade Microtech designed Tesla, the power device measurement system providing a complete on-wafer solution for over- temperature, low contact resistance measurements of power semiconductors up to 60A and 3000V.

For many years, power semiconductor device manufacturers have been forced to package their devices prior to characterization and model extraction. Wafer-level measurements on power devices have historically been fraught with unreliable or inaccurate data, extra costs, and uncertain delays in development schedules.

Technology innovations allow new on-wafer power device testing
Cascade Microtech's Tesla system features two new wafer probes, including a high current probe that reduces the potential for probe and device destruction during testing. The probe can support an unprecedented 10A of current in continuous mode and up to 60A of current in pulsed mode. To reduce device heating, the probe tip is designed to minimize contact resistance at the wafer-to-probe interface.

The Tesla system also features a high voltage probe that ensures a high performance electrical measurement path at high voltages. The high voltage probe provides the capability to make coaxial measurements up to 3000V and triaxial measurements up to 1100V. In addition, both the high current and the high voltage probes feature a replaceable tip that is easily changed. The Tesla system's wafer chuck provides state-of-the-art handling for thin wafers. An exclusive chuck top technology provides the right amount of vacuum in a delicate method that protects against wafer breakage and probe damage, all while ensuring a minimal contact resistance.

Other safety features of the Tesla system include the highly insulated and electrically shielded cable assemblies that provide both triaxial performance and high current/high voltage handling capabilities. To ensure operator safety, ease of set-up and configuration, Tesla offers a safety interlock system and remote system operation. The measurement environment and every component in the measurement path is designed and tested by Cascade Microtech to comply with voltages up to 3000V.

Price and availability for the complete Tesla system
Tesla is a turnkey, scaleable system. It is optimized for ease of purchase and configuration to create a safe testing environment for power semiconductor devices. Tesla includes Cascade Microtech's industry-leading wafer probe station and probes and proprietary safety components. The Tesla system starts at U.S. $200,000.

More info: Microtech Tesla On-Wafer Power Device Measurement System